Title :
Micro-mechanical external-cavity laser with wide tuning range
Author :
Geerlings, E. ; Rattunde, M. ; Schmitz, J. ; Kaufel, G. ; Wagner, J. ; Kallweit, D. ; Zappe, H.
Author_Institution :
IAF, Freiburg
Abstract :
We report on GaSb-based quantum-well diode lasers in a micro-machined external cavity setup using the Littrow configuration. An electrostatically-actuated silicon- grating, optimized to achieve a wide tuning range in the 2.3 mum wavelength range, is used as tuning element. A tuning range of 82 nm could be realized. The maximum output power of the micro external cavity laser (muECL) was above 15 mW over the entire tuning range.
Keywords :
laser beam machining; micromechanical devices; quantum well lasers; Littrow configuration; electrostatically-actuated silicon-grating; micromachined external cavity; micromechanical external-cavity laser; quantum-well diode lasers; wide tuning range; Diode lasers; Electrodes; Fabrication; Fiber lasers; Gas lasers; Gratings; Laser tuning; Optical design; Optical waveguides; Reflectivity;
Conference_Titel :
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location :
Hyogo
Print_ISBN :
978-1-4244-095-5
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2007.4433090