In-situ controlled growth of carbon nanotubes by local synthesis

Author

Kawano, Takeshi ; Cho, Chung Yeung ; Lin, Liwei

Author_Institution

Univ. of California at Berkeley, Berkeley

fYear

2007

fDate

21-25 Jan. 2007

Firstpage

831

Lastpage

834

Abstract

This work presents in-situ controlled growth of carbon nanotubes (CNTs) by local synthesis using silicon MEMS structures. The site-specific local synthesis and assembly of CNTs took 20 ~ 60 seconds experimentally to connect across a 5 ~ 10 mum gap to accomplish integrated CNTs. Using this method, we can now control the number of CNT connections between the silicon structures. The electrical properties of the silicon/CNT/silicon system show the linear current-voltage characteristics, indicating the ohmic contact behavior at the heterojunctions.

Keywords

carbon nanotubes; electric properties; micromechanical devices; ohmic contacts; silicon; carbon nanotube; electrical properties; in-situ controlled growth; linear current-voltage characteristics; microelectromechanical system; ohmic contact behavior; silicon MEMS structures; silicon-CNT-silicon system; site-specific local synthesis; Assembly; Carbon nanotubes; Control system synthesis; Electrodes; Micromechanical devices; Microstructure; Monitoring; Silicon; Voltage; Voltmeters;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on

Conference_Location

Hyogo

ISSN

1084-6999

Print_ISBN

978-1-4244-095-5

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2007.4433095

Filename

4433095