Dome or bump-shaped PVDF-TrFE films developed with a new mold-transfer method for flexible tactile sensors

Author

Li, Chunyan ; Lee, Soohyun ; Gorton, Andrew ; Schulz, Mark J. ; Ahn, Chong H.

Author_Institution

Univ. of Cincinnati, Cincinnati

fYear

2007

fDate

21-25 Jan. 2007

Firstpage

337

Lastpage

340

Abstract

In this work, a new mold-transfer method to pattern piezoelectric polymer film has been developed and applied to make an innovative dome or bump-shaped PVDF-TrFE film for flexible tactile sensors. Dome and bump-shaped PVDF-TrFE films have been successfully fabricated and characterized as a sensing component for flexible tactile sensors. Newly developed fabrication method provides a flexible way to pattern piezoelectric polymer with different shapes and dimensions. The sensors developed using this method show high sensitivity and strong mechanical strength for microcatheters or other applications. In addition, selective DC poling method for PVDF-TrFE film has been developed for the localized piezoelectric sensors with minimum crosstalk.

Keywords

catheters; flexible structures; microsensors; piezoelectric devices; polymer films; tactile sensors; transfer moulding; PVDF-TrFE films; bump-shaped polymer films; dome-shaped polymer films; flexible tactile sensors; localized piezoelectric sensors; microcatheters; mold-transfer method; piezoelectric polymer film; selective DC poling method; Assembly; Electrodes; Fabrication; Mechanical factors; Mechanical sensors; Micromechanical devices; Piezoelectric films; Polymer films; Shape; Tactile sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on

Conference_Location

Hyogo

ISSN

1084-6999

Print_ISBN

978-1-4244-095-5

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2007.4433104

Filename

4433104