1/4 miniaturized passive elements for GaAs MMICs

Novel miniature structures for passive elements-inductors and capacitors-are proposed to reduce the area they consume in GaAs MMICs. The miniaturized inductors are fabricated out of thick metal micro-wire, 10 mu m thick, 6 mu m wide, and with 2 mu m spacing. The miniaturized capacitors are constructed as a corrugated structure with an insulator layer sandwiched between electrodes on a SI GaAs substrate with 3- mu m-deep taper holes, in a checkerboard pattern. Both elements are fabricated employing very simple technology as a result of their monolayer structures. Adopting the proposed structures, the elements have been shrunk to 1/4 the size of conventional elements.<>