Chemical sensor utilizing indium phosphide cantilevers and pentacene as a functionalization layer

Author

Siwak, Nathan ; Fan, Xiao ; Hines, Dan ; Williams, Ellen ; Goldsman, Neil ; Ghodssi, Reza

Author_Institution

Univ. of Maryland, College Park

fYear

2007

fDate

21-25 Jan. 2007

Firstpage

489

Lastpage

492

Abstract

We present a MEMS cantilever waveguide resonator sensing platform utilizing a novel optical readout scheme and the organic semiconductor pentacene as a surface functionalization layer. Detection of vapor by way of mass induced frequency shift is demonstrated. Frequency shifts due to mass absorption of 509 and 236 Hz were measured to plusmn85 Hz corresponding to a sensitivity of plusmn0.507 pg. The III-V Indium Phosphide (InP) material enables passive waveguides and active optical components to be monolithically integrated, yielding single-chip sensors in the future.

Keywords

III-V semiconductors; cantilevers; chemical sensors; indium compounds; micromechanical devices; resonators; MEMS cantilever waveguide resonator; chemical sensor; indium phosphide cantilevers; organic semiconductor pentacene; surface functionalization layer; Chemical sensors; Frequency; III-V semiconductor materials; Indium phosphide; Micromechanical devices; Optical resonators; Optical sensors; Optical waveguides; Pentacene; Semiconductor waveguides;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on

Conference_Location

Hyogo

ISSN

1084-6999

Print_ISBN

978-1-4244-095-5

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2007.4433111

Filename

4433111