Title :
Chemical sensor utilizing indium phosphide cantilevers and pentacene as a functionalization layer
Author :
Siwak, Nathan ; Fan, Xiao ; Hines, Dan ; Williams, Ellen ; Goldsman, Neil ; Ghodssi, Reza
Author_Institution :
Univ. of Maryland, College Park
Abstract :
We present a MEMS cantilever waveguide resonator sensing platform utilizing a novel optical readout scheme and the organic semiconductor pentacene as a surface functionalization layer. Detection of vapor by way of mass induced frequency shift is demonstrated. Frequency shifts due to mass absorption of 509 and 236 Hz were measured to plusmn85 Hz corresponding to a sensitivity of plusmn0.507 pg. The III-V Indium Phosphide (InP) material enables passive waveguides and active optical components to be monolithically integrated, yielding single-chip sensors in the future.
Keywords :
III-V semiconductors; cantilevers; chemical sensors; indium compounds; micromechanical devices; resonators; MEMS cantilever waveguide resonator; chemical sensor; indium phosphide cantilevers; organic semiconductor pentacene; surface functionalization layer; Chemical sensors; Frequency; III-V semiconductor materials; Indium phosphide; Micromechanical devices; Optical resonators; Optical sensors; Optical waveguides; Pentacene; Semiconductor waveguides;
Conference_Titel :
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location :
Hyogo
Print_ISBN :
978-1-4244-095-5
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2007.4433111
