A feasibility study of a microaccelerometer with magnetorheological fluids

Author

Hu, G.Q. ; Liao, W.H.

Author_Institution

Dept. of Mech. & Electr. Eng., Xiamen Univ., China

Volume

2

fYear

2003

fDate

8-13 Oct. 2003

Firstpage

825

Abstract

This paper consists of four main parts about a novel microaccelerometer. First, magnetorheological (MR) fluids are applied to the microaccelerometer, in which the MR fluids provide adjustable damping and can increase the dielectric constant when used in the microaccelerometer. Second, the electrostatic force has been employed in the microaccelerometer for balancing force. Therefore, the measurement range of the microaccelerometer can be extended. The mathematical model of the microaccelerometer is derived to simulate the deflection of the silicon cantilever beam in the microaccelerometer. Third, the electrical properties of the microaccelerometer are also discussed. Last, the dynamic behaviors of the microaccelerometer are analyzed.

Keywords

accelerometers; capacitance; damping; magnetorheology; micromechanical devices; permittivity; capacitance; damping; dielectric constant; dynamic behaviors; electrical properties; electrostatic force; magnetorheological fluids; mathematical model; microaccelerometer; silicon cantilever beam deflection; Accelerometers; Biomedical measurements; Dielectric constant; Electrodes; Electrostatic measurements; Equations; Magnetic field measurement; Magnetic liquids; Silicon; Structural beams;

fLanguage

English

Publisher

ieee

Conference_Titel

Robotics, Intelligent Systems and Signal Processing, 2003. Proceedings. 2003 IEEE International Conference on

Print_ISBN

0-7803-7925-X

Type

conf

DOI

10.1109/RISSP.2003.1285693

Filename

1285693