A feasibility study of a microaccelerometer with magnetorheological fluids

This paper consists of four main parts about a novel microaccelerometer. First, magnetorheological (MR) fluids are applied to the microaccelerometer, in which the MR fluids provide adjustable damping and can increase the dielectric constant when used in the microaccelerometer. Second, the electrostatic force has been employed in the microaccelerometer for balancing force. Therefore, the measurement range of the microaccelerometer can be extended. The mathematical model of the microaccelerometer is derived to simulate the deflection of the silicon cantilever beam in the microaccelerometer. Third, the electrical properties of the microaccelerometer are also discussed. Last, the dynamic behaviors of the microaccelerometer are analyzed.