Title :
A novel scanning Thermal Microscopy System
Author :
Tanaka, Kastuhiro ; Kuwano, Hiroki ; Nagasawa, Sumito ; Ono, Takahito
Author_Institution :
Tohoku Univ., Sendai
Abstract :
This paper describes a concept, fabrication and evaluation of a novel nano-meter scale scanning thermal microscopy (SThM) system. The purpose of this research is a realization of a non contact type SThM system. A measurement probe in our system consists of a pyroelectoric detector and an infrared ray shielding film with an aperture for high lateral resolution. It is shown that the first results of the pyroelectric detector (PZT) and the shielding film with an aperture were successfully fabricated.
Keywords :
pyroelectric detectors; scanning tunnelling microscopy; infrared ray shielding film; pyroelectoric detector; scanning thermal microscopy system; Apertures; Atomic force microscopy; Electrodes; Fabrication; Infrared detectors; Optical feedback; Optical films; Probes; Pyroelectricity; Temperature measurement;
Conference_Titel :
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location :
Hyogo
Print_ISBN :
978-1-4244-095-5
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2007.4433123
