DocumentCode
2799775
Title
A novel scanning Thermal Microscopy System
Author
Tanaka, Kastuhiro ; Kuwano, Hiroki ; Nagasawa, Sumito ; Ono, Takahito
Author_Institution
Tohoku Univ., Sendai
fYear
2007
fDate
21-25 Jan. 2007
Firstpage
627
Lastpage
630
Abstract
This paper describes a concept, fabrication and evaluation of a novel nano-meter scale scanning thermal microscopy (SThM) system. The purpose of this research is a realization of a non contact type SThM system. A measurement probe in our system consists of a pyroelectoric detector and an infrared ray shielding film with an aperture for high lateral resolution. It is shown that the first results of the pyroelectric detector (PZT) and the shielding film with an aperture were successfully fabricated.
Keywords
pyroelectric detectors; scanning tunnelling microscopy; infrared ray shielding film; pyroelectoric detector; scanning thermal microscopy system; Apertures; Atomic force microscopy; Electrodes; Fabrication; Infrared detectors; Optical feedback; Optical films; Probes; Pyroelectricity; Temperature measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location
Hyogo
ISSN
1084-6999
Print_ISBN
978-1-4244-095-5
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2007.4433123
Filename
4433123
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