Single layer tilting actuator with multiple close-gap electrodes

We report on the novel architecture and operational principle of a tilting electrostatic actuator fabricated using single structural layer. The actuator is fabricated using silicon on insulator (SOI) technology and incorporates comb-like high aspect ratio electrodes oriented in the direction parallel to the rotation axis of the tilting element. Tilting motion is accompanied by the decrease of the distance between the electrodes, resulting in the non-uniform distribution of electrostatic pressure and appearance of the actuation torque. A feasibility study is performed using a reduced order model of the electrostatically actuated device and verified by a coupled three-dimensional simulation. Experimental results suggest that this architecture can be efficiently used for static and resonant operation of electrostatic devices where the tilting motion is desirable.