12-bit microelectromechanical digital-to-analog converter of displacement: Design, fabrication and characterization

A MicroElectroMechanical Digital-to-Analog Converter (MEMDAC) converts an input binary code into an output displacement proportional to the analog value given by the input code. We present a MEMDAC with improved kinematic design that allows large in-plane displacement range and high positioning resolution while making micro fabrication process less critical. A 12-bit MEMDAC is successfully fabricated and operated demonstrating a positioning resolution better than 3 nm and a total stroke of 8.57 mum at a driving voltage of 45 V. These features make it an attractive candidate for diverse applications in which open-loop positioning with high resolution, stability and repeatability are beneficial.