DocumentCode :
2799836
Title :
Magnetically actuated scanning microlens for NIR Raman spectroscopy
Author :
Siu, Chin-Pang-Billy ; Zeng, Haishan ; Chiao, Mu
Author_Institution :
Univ. of British Columbia, Vancouver
fYear :
2007
fDate :
21-25 Jan. 2007
Firstpage :
735
Lastpage :
738
Abstract :
This paper presents the design, fabrication and characterization of a magnetically actuated scanning microlens for miniature confocal near infrared (NIR) Raman spectroscopy. One of the potential applications could be on non-invasive skin cancer diagnosis. The microlens is comprised of a 20 mum thick ferromagnetic nickel platform integrated with a PDMS plano-convex lens with a diameter of 1.25 mm and an effective focal length of 2.0 mm. This work demonstrates a microlens with a scanning angle of plusmn24deg driven by an external AC magnetic field orientated at an angle of 30deg from the horizontal rotation axis. A coplanar 152 mum scanning range is demonstrated by a 22.2times10-3 Tesla external magnetic field at 197 Hz.
Keywords :
Raman spectroscopy; bioMEMS; microlenses; PDMS plano-convex lens; external AC magnetic field; ferromagnetic nickel platform integrated; frequency 197 Hz; magnetically actuated scanning microlens; miniature confocal near infrared Raman spectroscopy; noninvasive skin cancer diagnosis; size 1.25 mm; size 152 mum; size 2.0 mm; size 20 mum; Fabrication; Lenses; Magnetic fields; Microoptics; Nickel; Raman scattering; Silicon; Skin cancer; Spectroscopy; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location :
Hyogo
ISSN :
1084-6999
Print_ISBN :
978-1-4244-095-5
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2007.4433127
Filename :
4433127
Link To Document :
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