Title :
Near-field scanning optical micro probe integrated with a nanometer-sized light emitting diode
Author :
Hoshino, Kazunori ; Rozanski, Lynn ; Bout, David A Vanden ; Zhang, Xiaojing
Author_Institution :
Univ. of Texas at Austin, Austin
Abstract :
We have fabricated a MEMS microprobe integrated with a nanometer-sized light emitting diode (LED) on the tip for near-field scanning optical microscopy (NSOM). The probe body and the LED electrodes were made by wet-etching and focused ion beam(FIB) cutting of an SOI wafer. Semiconductor nanoparticles (CdSe/ZnS core-shell nanoparticles) were electrostatically trapped and excited within an electrode gap made on the probe tip. The LED-tip size is approximately 100 nm x 100 nm. The probe was tested with an NSOM setup. The probe tip was kept within roughly 5 nm from the surface to yield a successful topographic image of a sample.
Keywords :
II-VI semiconductors; cadmium compounds; etching; focused ion beam technology; light emitting diodes; micromechanical devices; nanoparticles; optical microscopy; zinc compounds; CdSe-ZnS; LED electrodes; MEMS microprobe; SOI wafer; core-shell nanoparticles; focused ion beam cutting; nanometer-sized light emitting diode; near-field scanning optical microprobe; near-field scanning optical microscopy; semiconductor nanoparticles; wet etching; Electrodes; Focusing; Integrated optics; Light emitting diodes; Micromechanical devices; Nanoparticles; Optical microscopy; Particle beam optics; Probes; Stimulated emission;
Conference_Titel :
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location :
Hyogo
Print_ISBN :
978-1-4244-095-5
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2007.4433129