Title :
A packaged micromachined switched tunable inductor
Author :
Rais-Zadeh, Mina ; Kohl, Paul A. ; Ayazi, Farrokh
Author_Institution :
School of Electrical & Computer Engineering, Georgia Institute of Technology, Atlanta, USA
Abstract :
A new implementation of micromachined switched tunable inductors using transformer action and electrostatically- actuated switches is presented. The inductors and the micromachined ohmic switches are made of silver (Ag) to minimize the resistive loading on the effective inductance and achieve large tuning and high quality factor (Q). The presented tunable inductor is packaged using a low-cost wafer-level polymer packaging technique and shows no degradation in quality factor after packaging.
Keywords :
inductors; silver; switches; transformers; electrostatically-actuated switch; micromachined ohmic switch; micromachined switched tunable inductor; transformer; wafer-level polymer packaging technique; Coils; Inductance; Inductors; Micromachining; Packaging; Q factor; Silver; Switches; Tuning; Wafer scale integration;
Conference_Titel :
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location :
Hyogo
Print_ISBN :
978-1-4244-095-5
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2007.4433132
