DocumentCode
2799928
Title
A packaged micromachined switched tunable inductor
Author
Rais-Zadeh, Mina ; Kohl, Paul A. ; Ayazi, Farrokh
Author_Institution
School of Electrical & Computer Engineering, Georgia Institute of Technology, Atlanta, USA
fYear
2007
fDate
21-25 Jan. 2007
Firstpage
799
Lastpage
802
Abstract
A new implementation of micromachined switched tunable inductors using transformer action and electrostatically- actuated switches is presented. The inductors and the micromachined ohmic switches are made of silver (Ag) to minimize the resistive loading on the effective inductance and achieve large tuning and high quality factor (Q). The presented tunable inductor is packaged using a low-cost wafer-level polymer packaging technique and shows no degradation in quality factor after packaging.
Keywords
inductors; silver; switches; transformers; electrostatically-actuated switch; micromachined ohmic switch; micromachined switched tunable inductor; transformer; wafer-level polymer packaging technique; Coils; Inductance; Inductors; Micromachining; Packaging; Q factor; Silver; Switches; Tuning; Wafer scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location
Hyogo
ISSN
1084-6999
Print_ISBN
978-1-4244-095-5
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2007.4433132
Filename
4433132
Link To Document