DocumentCode :
2800032
Title :
Non-isothermal micromechanical resonators
Author :
Chandorka, S.A. ; Mehta, H. ; Agarwal, M. ; Hopcroft, M.A. ; Jha, C.M. ; Candler, R.N. ; Yama, G. ; Bahl, G. ; Kim, B. ; Melamud, R. ; Goodson, K.E. ; Kenny, T.W.
Author_Institution :
Stanford Univ., Stanford
fYear :
2007
fDate :
21-25 Jan. 2007
Firstpage :
211
Lastpage :
214
Abstract :
In this work, we study the effect of non-isothermal operation on beam-type micromechanical resonators. A double ended tuning fork (DETF) resonator was studied under a linearly varying temperature profile along the length of the beam. We present models which show that for a constant center temperature of the beams, increasing the linear temperature gradient along the DETF substantially increases the quality factor (Q), with marginal effect on frequency. We also find that it is possible to use non-isothermal operation to improve quality factor in MEMS resonator based ovenized reference oscillators.
Keywords :
Q-factor; micromechanical resonators; oscillators; vibrations; MEMS resonator; beam length; double ended tuning fork resonator; linear temperature gradient; nonisothermal micromechanical resonator; ovenized reference oscillator; quality factor; Heating; Isothermal processes; Micromechanical devices; Oscillators; Q factor; Resonance; Resonant frequency; Stability; Temperature; Vibrations;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location :
Hyogo
ISSN :
1084-6999
Print_ISBN :
978-1-4244-095-5
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2007.4433138
Filename :
4433138
Link To Document :
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