Title :
2D electro-thermal microgrippers with large clamping and rotation motion at low driving voltage
Author :
Due, T.C. ; Lau, G.K. ; Wei, J. ; Sarro, P.M.
Author_Institution :
Delft Univ. of Technol., Delft
Abstract :
This paper presents a novel 2D electro-thermal microgripper based on integrated silicon-polymer laterally stacked forward actuators. Displacements up to 8 and 13 mum along x-axis andy-axis at 2 V are measured. The microgripper is capable of rotating the clamped object both clockwise and counter-clockwise. Maximum average working temperature is 16degC.
Keywords :
grippers; microactuators; micromanipulators; 2D electrothermal microgrippers; driving voltage; forward actuators; integrated silicon-polymer; size 13 mum; size 8 mum; temperature 16 C; voltage 2 V; Actuators; Clamps; Grippers; Heat transfer; Low voltage; Polymer films; Silicon; Temperature; Thermal conductivity; Thermal expansion; 2D microgripper; constrained polymer; electro-thermal actuator; forward actuator;
Conference_Titel :
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location :
Hyogo
Print_ISBN :
978-1-4244-095-5
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2007.4433168
