Title :
Silicon-organic hybrid fabrication platform for integrated circuits
Author :
Korn, D. ; Alloatti, L. ; Lauermann, M. ; Pfeifle, J. ; Palmer, R. ; Schindler, Philipp C. ; Freude, W. ; Koos, C. ; Leuthold, Juerg ; Hui Yu ; Bogaerts, W. ; Komorowska, K. ; Baets, Roel ; Van Campenhout, J. ; Verheyen, P. ; Wouters, Jan ; Moelants, M. ;
Author_Institution :
Inst. of Photonics & Quantum Electron. (IPQ), Karlsruhe Inst. of Technol. (KIT), Karlsruhe, Germany
Abstract :
The combination of CMOS compatible Silicon-On-Insulator (SOI) fabrication technology with organic cover materials constitutes the Silicon-Organic Hybrid (SOH) fabrication platform, which shows innovative functionality for the making of integrated optical circuits. We report on experimental demonstrations of essential building blocks for transceivers, while relying only on well-known SOI processing steps and simple post processing of the organic materials.
Keywords :
CMOS integrated circuits; elemental semiconductors; integrated optics; optical transceivers; silicon; silicon-on-insulator; CMOS compatible silicon-on-insulator fabrication technology; SOI processing steps; Si; integrated circuits; integrated optical circuits; organic cover materials; organic materials; silicon-organic hybrid fabrication platform; transceivers; Electrooptical waveguides; Modulation; Optical device fabrication; Silicon; electro-optic devices; modulators; photonic integrated circuits; silicon-on-insulator; silicon-organic hybrid;
Conference_Titel :
Transparent Optical Networks (ICTON), 2012 14th International Conference on
Conference_Location :
Coventry
Print_ISBN :
978-1-4673-2228-7
Electronic_ISBN :
2161-2056
DOI :
10.1109/ICTON.2012.6254470
