Title :
High yield grafting of carbon nanotube on ultra-sharp silicon nanotips: Mechanical characterization and AFM imaging
Author :
Rollier, A.-S. ; Bernard, C. ; Marsaudon, S. ; Bonnot, A.-M. ; Faucher, M. ; Aimé, J. -P ; Legrand, B. ; Collard, D. ; Buchaillot, L.
Author_Institution :
IEMN, Villeneuve-d´´Ascq
Abstract :
The novelty of this work lies in the fabrication of nanotips without any facet allowing the high yield of robust carbon nanotube (CNT) grafting for atomic force microscopy (AFM) experiments.
Keywords :
atomic force microscopy; carbon nanotubes; nanotechnology; atomic force microscopy imaging; carbon nanotube; high yield grafting; mechanical characterization; silicon nanotips; Atomic force microscopy; Carbon nanotubes; Fabrication; Hafnium; Nickel; Oxidation; Probes; Robustness; Silicon; Wet etching;
Conference_Titel :
Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on
Conference_Location :
Hyogo
Print_ISBN :
978-1-4244-095-5
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2007.4433179
