Title :
CMOS-MEMS free-free beam resonators
Author :
López, JL ; Marigó, E. ; Giner, J. ; Muñoz-Gamarra, JL ; Torres, F. ; Uranga, A. ; Barniol, N.
Author_Institution :
Dept. Electron. Eng., Univ. Autonoma de Barcelona, Barcelona, Spain
Abstract :
In this paper a 25 MHz free-free beam flexural resonator monolithically integrated in a 0.35 um CMOS technology is presented. A comparison between the frequency response and electrical characteristics between free-free beam and clamped-clamped beams shows higher qualities factor for free-free beams which will allow better oscillators for frequency references in terms of phase noise.
Keywords :
CMOS integrated circuits; frequency response; micromechanical resonators; oscillators; phase noise; CMOS-MEMS; clamped-clamped beams; free-free beam flexural resonator; frequency 25 MHz; frequency response; monolithically integrated CMOS technology; oscillators; phase noise; size 0.35 mum; CMOS integrated circuits; CMOS technology; Equations; Mathematical model; Micromechanical devices; Q factor; Resonant frequency;
Conference_Titel :
Solid-State Device Research Conference (ESSDERC), 2010 Proceedings of the European
Conference_Location :
Sevilla
Print_ISBN :
978-1-4244-6658-0
DOI :
10.1109/ESSDERC.2010.5618173
