DocumentCode :
2800979
Title :
Electro-thermal analysis of RF MEM capacitive switches for high-power applications
Author :
Solazzi, Francesco ; Palego, Cristiano ; Halder, Subrata ; Hwang, James C M ; Faes, Alessandro ; Mulloni, Viviana ; Margesin, Benno ; Farinelli, Paola ; Sorrentino, Roberto
Author_Institution :
Lehigh Univ., Bethlehem, PA, USA
fYear :
2010
fDate :
14-16 Sept. 2010
Firstpage :
468
Lastpage :
471
Abstract :
Self heating in electrostatically actuated RF MEM capacitive shunt switches is analyzed by coupled electrical and thermal simulations using three-dimensional finite-element analysis. The result shows that despite highly nonuniform current and temperature distributions, the self-heating effect can be approximated by lumped thermal resistances of the switch membrane and the substrate. Additionally, since the thermal resistance of thermally insulating substrates such as quartz is significant compared to that of the membrane, it is important to consider the heat transfer across both the membrane and the substrate.
Keywords :
finite element analysis; microswitches; thermal analysis; RF MEM capacitive shunt switch; electrical simulation; electro-thermal analysis; heat transfer; high power application; lumped thermal resistance; self-heating effect; substrate; switch membrane; temperature distribution; thermal simulation; three-dimensional finite element analysis; Biomembranes; Conductors; Radio frequency; Silicon; Solid modeling; Substrates; Thermal resistance;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Device Research Conference (ESSDERC), 2010 Proceedings of the European
Conference_Location :
Sevilla
ISSN :
1930-8876
Print_ISBN :
978-1-4244-6658-0
Type :
conf
DOI :
10.1109/ESSDERC.2010.5618174
Filename :
5618174
Link To Document :
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