Title :
Simulation and 3D Characterization of Microsystems
Author :
Bercu, Bogdan ; Montès, Laurent ; Morfouli, Panagiota ; Mathieu, Nathalie
Author_Institution :
ENSERG, Grenoble
Abstract :
To add more functionalities to microelectronic circuits, microsystems offer growing number of applications. An advanced practical work that combines simulation and optical characterization of microsystems is presented in this paper. It emphases through simulation and characterization results the different characteristics of some of the most utilized microsystems.
Keywords :
micromechanical devices; optical properties; 3D characterization; microelectronic circuits; micromechanical devices; microsystem simulation; optical characterization; Biomembranes; Circuit simulation; Microelectronics; Micromechanical devices; Modal analysis; Optical interferometry; Optical sensors; Resonance; Sensor phenomena and characterization; Silicon;
Conference_Titel :
Microelectronic Systems Education, 2007. MSE '07. IEEE International Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7695-2849-X
DOI :
10.1109/MSE.2007.75
