DocumentCode
2803532
Title
Simulation and 3D Characterization of Microsystems
Author
Bercu, Bogdan ; Montès, Laurent ; Morfouli, Panagiota ; Mathieu, Nathalie
Author_Institution
ENSERG, Grenoble
fYear
2007
fDate
3-4 June 2007
Firstpage
107
Lastpage
108
Abstract
To add more functionalities to microelectronic circuits, microsystems offer growing number of applications. An advanced practical work that combines simulation and optical characterization of microsystems is presented in this paper. It emphases through simulation and characterization results the different characteristics of some of the most utilized microsystems.
Keywords
micromechanical devices; optical properties; 3D characterization; microelectronic circuits; micromechanical devices; microsystem simulation; optical characterization; Biomembranes; Circuit simulation; Microelectronics; Micromechanical devices; Modal analysis; Optical interferometry; Optical sensors; Resonance; Sensor phenomena and characterization; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Systems Education, 2007. MSE '07. IEEE International Conference on
Conference_Location
San Diego, CA
Print_ISBN
0-7695-2849-X
Type
conf
DOI
10.1109/MSE.2007.75
Filename
4231471
Link To Document