Title :
High-resolution current and temperature mapping of electronic devices using scanning Joule expansion microscopy
Author :
Varesi, J. ; Muenster, S. ; Majumdar, A.
Author_Institution :
Dept. of Mech. Eng., California Univ., Berkeley, CA, USA
fDate :
March 31 1998-April 2 1998
Abstract :
A new technique called scanning Joule expansion microscopy has been developed to measure the current and temperature distributions of electronic devices and interconnects with 0.01 /spl mu/m spatial resolution and 20 kHz-1 GHz frequency bandwidth. Based on the atomic force microscope, the technique relies on measuring the AC modulated thermal expansion of a sample due to Joule heating.
Keywords :
atomic force microscopy; electric current measurement; heating; integrated circuit interconnections; integrated circuit measurement; integrated circuit reliability; temperature distribution; temperature measurement; thermal expansion; 20 kHz to 1 GHz; AC modulated thermal expansion; Joule heating; atomic force microscope; current distribution; current mapping; electronic device interconnects; electronic devices; mapping resolution; scanning Joule expansion microscopy; temperature distribution; temperature mapping; Atomic force microscopy; Atomic measurements; Bandwidth; Current measurement; Force measurement; Frequency measurement; Scanning electron microscopy; Spatial resolution; Temperature distribution; Thermal force;
Conference_Titel :
Reliability Physics Symposium Proceedings, 1998. 36th Annual. 1998 IEEE International
Conference_Location :
Reno, NV, USA
Print_ISBN :
0-7803-4400-6
DOI :
10.1109/RELPHY.1998.670507
