Film bulk acoustic wave filters using lead titanate on silicon substrate

Author

Misu, Koichiro ; Nagatsuka, Tsutomu ; Wadaka, Shusou ; Maeda, Chisako ; Yamada, Akira

Author_Institution

Mitsubishi Electr. Corp., Kamakura, Japan

Volume

2

fYear

1998

fDate

1998

Firstpage

1091

Abstract

A film bulk acoustic wave resonator and filter at GHz frequencies is reported. The resonator and filter employ lead titanate (PbTiO₃) as the piezoelectric thin film. The films are formed by RF magnetron sputter deposition on silicon (Si) substrates. Platinum (Pt) is used as top and bottom electrodes. The thickness of the piezoelectric film is about 1 μm, and that of the electrodes is 0.1 μm. The chip size of the resonator and filter is 0.69×0.55 (mm). The resonant frequency of the fabricated resonator is 1.4 GHz. The top electrode size of the resonator is 50×50 (μm), and the quality factor Q is about 70. The insertion loss of the fabricated filter is 13.6 dB at the frequency of 1.5 GHz, and the 3 dB bandwidth is 47 MHz

Keywords

Q-factor; UHF filters; bulk acoustic wave devices; crystal filters; crystal resonators; elemental semiconductors; lead compounds; losses; piezoelectric materials; piezoelectric thin films; platinum; silicon; sputter deposition; 0.1 mum; 0.55 mm; 0.69 mm; 1 mum; 1.4 GHz; 1.5 GHz; 13.6 dB; 47 MHz; 50 mum; GHz frequencies; PbTiO₃; Pt; RF magnetron sputter deposition; Si; chip size; film bulk acoustic wave filters; film bulk acoustic wave resonator; insertion loss; lead titanate; piezoelectric thin film; platinum electrodes; quality factor; resonant frequency; silicon substrate; top electrode size; Acoustic waves; Electrodes; Film bulk acoustic resonators; Frequency; Magnetic separation; Piezoelectric films; Resonator filters; Semiconductor films; Silicon; Titanium compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE

Conference_Location

Sendai

ISSN

1051-0117

Print_ISBN

0-7803-4095-7

Type

conf

DOI

10.1109/ULTSYM.1998.765021

Filename

765021