Title :
Laser probing and FEM modeling of ultrasonically vibrating surfaces
Author :
Tikka, P.T. ; Kaitila, J. ; Ylilammi, M. ; Makkonen, T. ; Knuuttila, J.V. ; Hashimoto, K. ; Salomaa, M.M.
Author_Institution :
Mater. Phys. Lab., Helsinki Univ. of Technol., Espoo, Finland
Abstract :
We have probed ultrasonic vibrations of a piezoelectric thin film utilizing a scanning laser interferometric technique. The vibrations are also simulated using a “toy” model of a membrane of zero thickness, and applying 2D FEM modeling for the solution of the eigenmodes. Despite the strong truncations used in the modeling, the agreement between our simulations and the measurements for several of the modes is striking. The samples were fabricated by patterning thin films photolithographically
Keywords :
eigenvalues and eigenfunctions; finite element analysis; light interferometry; measurement by laser beam; piezoelectric thin films; surface phonons; ultrasonic measurement; 2D FEM modeling; FEM modeling; eigenmodes; laser probing; membrane; patterning; photolithography; piezoelectric thin film; scanning laser interferometric technique; strong truncations; thin films; toy model; ultrasonic vibrating surfaces; ultrasonic vibrations; vibrations; Biomembranes; Boundary conditions; Electrodes; Laser modes; Laser theory; Microscopy; Optical surface waves; Shape measurement; Surface emitting lasers; Velocity measurement;
Conference_Titel :
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
Conference_Location :
Sendai
Print_ISBN :
0-7803-4095-7
DOI :
10.1109/ULTSYM.1998.765040
