Photothermal operation of the micro-mechanical resonators

Author

Iwatsuki, Takaaki ; Hane, Kazuhiro ; Okuma, Shigeru

Author_Institution

Dept. of Electron. Mech. Eng., Nagoya Univ., Japan

fYear

1991

fDate

3-5 Nov 1991

Firstpage

1141

Abstract

The operation of small mechanical resonator by laser irradiation is reported. The bending moment caused by the photothermal effect is advantageously used for the driving force of the vibration. The bending moment was calculated theoretically for the layered plate-like structures. The authors fabricated the micro-cantilever as a mechanical resonator by lithographic process. The characteristics of the vibration were investigated in vacuum. In addition, the flexural progressive wave was excited on the thin plate structures by using two lasers with different modulation phases

Keywords

micromechanical devices; nonelectric sensing devices; photothermal effects; resonators; bending moment; driving force; flexural progressive wave; laser irradiation; layered plate-like structures; lithographic process; micro-cantilever; micro-mechanical resonators; modulation phases; photothermal effect; thin plate structures; Laser excitation; Laser theory; Optical films; Optical resonators; Optical sensors; Optical surface waves; Photothermal effects; Temperature distribution; Thick film sensors; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Robots and Systems '91. 'Intelligence for Mechanical Systems, Proceedings IROS '91. IEEE/RSJ International Workshop on

Conference_Location

Osaka

Print_ISBN

0-7803-0067-X

Type

conf

DOI

10.1109/IROS.1991.174651

Filename

174651