The Integration and Application of Machine Vision by Using Ultra-low Alignment Stage

Integrating machine vision and motion control method into a double layers alignment system is a popular issue in flat panel display and semiconductor industry. An ultra-low stage is considered to compensate the posture between the upper and nether misalignment. Classic template matching is introduced in this paper to recognize the fiducial marks in this proposed alignment system. The compensate variables with the vision posture are integrated to implement the alignment system using an ultra-low stage. Experimental results are shown to demonstrate the feasibility of this system.