The measurement developing of wafer level MEMS microphone

This paper investigates about characteristic measurement methods and experimental results for micro-capacitance and electro-acoustics of wafer level MEMS microphone. And this paper also studies packaging and measurement for the microphone product to verify yield of semi-finished products from the measurement methods to save cost of the production. The repeatability of the micro-capacitance measurement system is high, and construction of direct sound source with high stability and uniformity can make high repeatability and can help understand more about impact of reflection of acoustic field for measuring the sound intensity.