Abstract :
MEMS (Micro-Electro-Mechanical Systems) based components such as inductors, variable capacitors, transmission line, filter, switches, phase-shifter, and resonators are superior in performances in term of quality factor, noise, linearity, power consumption, size, and cost, which cannot be achieved by conventional approach. This work discusses the MEMS enabled RF (Radio Frequency) signal source that can be prime candidate for ubiquitous connectivity, and is also amenable for IC (integrated circuit) fabrication.
Keywords :
micromechanical devices; radio equipment; MEMS; RF-signal source; integrated circuit fabrication; microelectromechanical systems; radio frequency signal source; ubiquitous connectivity; Capacitors; Inductors; Microelectromechanical systems; Micromechanical devices; Power transmission lines; Q factor; Radio frequency; Radiofrequency integrated circuits; Resonator filters; Switches;
