Analysis on principle and key techniques of deterministic finishing

Author

Zhang, Yanfu ; Wang, Bo ; Dong, Shen

Author_Institution

Coll. of Mech. & Electron. Eng., Shenyang Aerosp. Univ., Shenyang, China

fYear

2011

fDate

15-17 July 2011

Firstpage

3897

Lastpage

3900

Abstract

Soft finishing methods are required to meet the need of modern optical surface while the deterministic finishing processing is needed to ensure the high precession surface.. The concepts and the math model of deterministic finishing are presented. The key technologies of deterministic finishing are analyzed, which include the requirement of removal rate function, the solving method of dwell time, and the finishing scan path. The deterministic finishing methods used at present are Small Tool Lapping and Polishing (STLP), Magneto-Rheological Finishing (MRF), Ion Beam Figuring (IBF), Atmospheric Pressure Plasma Chemical Finishing (APPCF) and so on. The principle, removal rate function characteristic and new development of these deterministic finishing methods are introduced.

Keywords

magnetorheology; optical fabrication; polishing; surface finishing; atmospheric pressure plasma chemical finishing; deterministic finishing; high precession surface; ion beam figuring; magneto rheological finishing; modern optical surface; removal rate function; small tool lapping; small tool polishing; soft finishing methods; Adaptive optics; Finishing; Ion beams; Optical device fabrication; Particle beam optics; Plasmas; APPCF; Deterministic Finishing; IBF; MRF; Optical Surface; STLP;

fLanguage

English

Publisher

ieee

Conference_Titel

Mechanic Automation and Control Engineering (MACE), 2011 Second International Conference on

Conference_Location

Hohhot

Print_ISBN

978-1-4244-9436-1

Type

conf

DOI

10.1109/MACE.2011.5987851

Filename

5987851