DocumentCode
2808975
Title
Chemical cleaning of dispenser cathodes
Author
Tarter, J.O. ; Farrell, J.J.
Author_Institution
Semicon Associates, Lexington, KY, USA
fYear
2003
fDate
28-30 May 2003
Firstpage
178
Abstract
This paper describes about the chemical cleaning process of excess impregnant from the emitting surface of dispenser cathodes during the production process, its effects, a mechanical method for the chemical removal of excess impregnant material. However, this can have detrimental effects on the emitting surface of the cathode as shown in SEM photomicrographs.
Keywords
cathodes; scanning electron microscopy; surface cleaning; SEM photomicrographs; chemical cleaning process; dispenser cathodes; impregnant material removal; mechanical method; Barium; Cathodes; Chemical processes; Chemical products; Cleaning; Drives; Manufacturing; Mechanical variables measurement; Production; Tungsten;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Electronics, 2003 4th IEEE International Conference on
Print_ISBN
0-7803-7699-4
Type
conf
DOI
10.1109/IVEC.2003.1286221
Filename
1286221
Link To Document