Title :
Chemical cleaning of dispenser cathodes
Author :
Tarter, J.O. ; Farrell, J.J.
Author_Institution :
Semicon Associates, Lexington, KY, USA
Abstract :
This paper describes about the chemical cleaning process of excess impregnant from the emitting surface of dispenser cathodes during the production process, its effects, a mechanical method for the chemical removal of excess impregnant material. However, this can have detrimental effects on the emitting surface of the cathode as shown in SEM photomicrographs.
Keywords :
cathodes; scanning electron microscopy; surface cleaning; SEM photomicrographs; chemical cleaning process; dispenser cathodes; impregnant material removal; mechanical method; Barium; Cathodes; Chemical processes; Chemical products; Cleaning; Drives; Manufacturing; Mechanical variables measurement; Production; Tungsten;
Conference_Titel :
Vacuum Electronics, 2003 4th IEEE International Conference on
Print_ISBN :
0-7803-7699-4
DOI :
10.1109/IVEC.2003.1286221
