A Free-Space Tunable Beam Expander Designed for Automated Assembly

Author

Tsang, See-Ho ; Sameoto, Dan ; Parameswaran, Ash

Author_Institution

Simon Fraser Univ., Burnaby

fYear

2007

fDate

22-26 April 2007

Firstpage

292

Lastpage

295

Abstract

The authors present the first reported free space tunable beam expander produced in the PolyMUMPs process that can be assembled using an automated prober. The optical system consists of an optic fiber guide and two Fresnel zone plates. One Fresnel zone plate is fixed to the substrate whereas the other is attached to an adjustable platform. The platform has a travel range of 330 mum and is powered by an electrothermal vibromotor. The combined system has a back focal length range of -2 mm to infinity and infinity to 1.6 mm depending on the position of the Fresnel zone plates. Detailed design and results for the fabricated device are presented in this paper.

Keywords

micro-optomechanical devices; Fresnel zone plates; PolyMUMP; automated assembly; automated prober; electrothermal vibromotor; free-space tunable beam expander; optic fiber guide; size 330 mum; Assembly systems; Electron optics; Electrothermal effects; Equations; Fresnel reflection; H infinity control; Lenses; Optical design; Optical device fabrication; Optical devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical and Computer Engineering, 2007. CCECE 2007. Canadian Conference on

Conference_Location

Vancouver, BC

ISSN

0840-7789

Print_ISBN

1-4244-1020-7

Electronic_ISBN

0840-7789

Type

conf

DOI

10.1109/CCECE.2007.79

Filename

4232738