Title :
A Free-Space Tunable Beam Expander Designed for Automated Assembly
Author :
Tsang, See-Ho ; Sameoto, Dan ; Parameswaran, Ash
Author_Institution :
Simon Fraser Univ., Burnaby
Abstract :
The authors present the first reported free space tunable beam expander produced in the PolyMUMPs process that can be assembled using an automated prober. The optical system consists of an optic fiber guide and two Fresnel zone plates. One Fresnel zone plate is fixed to the substrate whereas the other is attached to an adjustable platform. The platform has a travel range of 330 mum and is powered by an electrothermal vibromotor. The combined system has a back focal length range of -2 mm to infinity and infinity to 1.6 mm depending on the position of the Fresnel zone plates. Detailed design and results for the fabricated device are presented in this paper.
Keywords :
micro-optomechanical devices; Fresnel zone plates; PolyMUMP; automated assembly; automated prober; electrothermal vibromotor; free-space tunable beam expander; optic fiber guide; size 330 mum; Assembly systems; Electron optics; Electrothermal effects; Equations; Fresnel reflection; H infinity control; Lenses; Optical design; Optical device fabrication; Optical devices;
Conference_Titel :
Electrical and Computer Engineering, 2007. CCECE 2007. Canadian Conference on
Conference_Location :
Vancouver, BC
Print_ISBN :
1-4244-1020-7
Electronic_ISBN :
0840-7789
DOI :
10.1109/CCECE.2007.79
