Polymethylglutarimide As a Structural MEMS Material

This work describes a micromachining process consisting of a single Polymethylglutarimide structural layer. Release of the structures is performed using a XeF₂ bulk silicon etch and electrical excitation is provided by a patterned metal layer. A full description of the process is given along with a discussion of the results of the fabrication runs. Data showing the performance of thermal actuators is also provided. Possible further improvements to the fabrication process are identified.