DocumentCode :
2809607
Title :
Large area growth of aligned carbon nanotubes on display glass
Author :
Rupesinghe, N.L. ; Cha, S.N. ; Jang, J.E. ; Chhowalla, M. ; Teo, K.B.K. ; Lacerda, R.G. ; Amaratunga, G.A.J. ; Han, I.T.
Author_Institution :
Dept. of Eng., Cambridge Univ., UK
fYear :
2003
fDate :
28-30 May 2003
Firstpage :
213
Lastpage :
214
Abstract :
This paper deals with large area growth of vertically aligned CNTs on CF-77 and TFT glass substrates up to 6 inches square. The CNTs are grown at 550°C using invar as a catalyst by initiating a DC glow discharge plasma of C2H2 and NH3 at -600 V using an 10 kW DC generator.
Keywords :
carbon nanotubes; catalysis; glow discharges; plasma CVD; -600 V; 10 kW; 550 degC; CF-77; DC generator; TFT display glass; aligned carbon nanotubes growth; glow discharge plasma; invar; thin film transistor; Carbon nanotubes; Chemical technology; Electron emission; Electron guns; Flat panel displays; Glass; Plasma displays; Prototypes; Size control; Stability;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Electronics, 2003 4th IEEE International Conference on
Print_ISBN :
0-7803-7699-4
Type :
conf
DOI :
10.1109/IVEC.2003.1286256
Filename :
1286256
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2809607
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