• DocumentCode
    2810865
  • Title

    MEMS templating technique for miniaturization of carbon nanotube field emission guns

  • Author

    Ribaya, Bryan P. ; Niemann, Darrell L. ; Rahman, Mahmud ; Blake, David F. ; Nguyen, Cattien V.

  • Author_Institution
    Electron Devices Lab., Santa Clara Univ., Santa Clara, CA, USA
  • fYear
    2009
  • fDate
    28-30 April 2009
  • Firstpage
    88
  • Lastpage
    89
  • Abstract
    We demonstrate a novel MEMS technique for fabrication of a well-aligned individual carbon nanotube field emission gun for high-resolution electron beam applications.
  • Keywords
    carbon nanotubes; electron beam applications; electron field emission; electron guns; MEMS templating technique; carbon nanotube field emission guns; electron field emission; electron gun; high-resolution electron beam applications; miniaturization; Anodes; Apertures; Biomembranes; Carbon nanotubes; Cathodes; Electron beams; Electron emission; Guns; Micromechanical devices; Scanning electron microscopy; Individual carbon nanotube cathode; electron field emission; electron gun; miniaturization;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Electronics Conference, 2009. IVEC '09. IEEE International
  • Conference_Location
    Rome
  • Print_ISBN
    978-1-4244-3500-5
  • Electronic_ISBN
    978-1-4244-3501-2
  • Type

    conf

  • DOI
    10.1109/IVELEC.2009.5193382
  • Filename
    5193382
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2810865