Title :
MEMS templating technique for miniaturization of carbon nanotube field emission guns
Author :
Ribaya, Bryan P. ; Niemann, Darrell L. ; Rahman, Mahmud ; Blake, David F. ; Nguyen, Cattien V.
Author_Institution :
Electron Devices Lab., Santa Clara Univ., Santa Clara, CA, USA
Abstract :
We demonstrate a novel MEMS technique for fabrication of a well-aligned individual carbon nanotube field emission gun for high-resolution electron beam applications.
Keywords :
carbon nanotubes; electron beam applications; electron field emission; electron guns; MEMS templating technique; carbon nanotube field emission guns; electron field emission; electron gun; high-resolution electron beam applications; miniaturization; Anodes; Apertures; Biomembranes; Carbon nanotubes; Cathodes; Electron beams; Electron emission; Guns; Micromechanical devices; Scanning electron microscopy; Individual carbon nanotube cathode; electron field emission; electron gun; miniaturization;
Conference_Titel :
Vacuum Electronics Conference, 2009. IVEC '09. IEEE International
Conference_Location :
Rome
Print_ISBN :
978-1-4244-3500-5
Electronic_ISBN :
978-1-4244-3501-2
DOI :
10.1109/IVELEC.2009.5193382
