Title :
Electron emission behaviors of ferroelectric materials
Author :
Sidorkin, V.A. ; Bourim, E.M. ; Kim, D.-W. ; Moon, C.W. ; Yoo, In K.
Author_Institution :
Samsung Adv. Inst. of Technol., Suwon, South Korea
Abstract :
In this work electron emission generated by polarization switching of ferroelectrics has been investigated. In this work special measurement techniques were used to study the electron emission behaviors. Electron-beam resist coated wafers were used to obtain spatial distribution of the emitted electrons. Triglycine sulphate crystals was studied by varying experimental conditions and heat treatment conditions of the samples. Surface flashover plasma of a ferroelectric origin was observed on a polar ferroelectric surface. In our work plasma formation is proved by correlation between the main switching parameters and emission of electrons from ferroelectrics-coercive field and threshold field of emission.
Keywords :
coercive force; dielectric polarisation; electron emission; electron resists; ferroelectric materials; ferroelectric switching; heat treatment; organic compounds; surface plasmons; coercive field; electron beam resist coated wafers; electron emission behaviors; ferroelectric materials; heat treatment; polar ferroelectric surface; polarization switching; surface flashover plasma; switching parameters; triglycine sulphate crystals; Crystals; Electron emission; Ferroelectric materials; Flashover; Heat treatment; Measurement techniques; Plasma measurements; Polarization; Resists; Surface treatment;
Conference_Titel :
Vacuum Electronics, 2003 4th IEEE International Conference on
Print_ISBN :
0-7803-7699-4
DOI :
10.1109/IVEC.2003.1286334
