An experimental study on vacuum-ultraviolet photochemical reaction to non-thermal plasma oxidized SF6 gases

For removal treatments of used sulfur hexafluoride (SF₆) gas, a combination process in non-thermal plasma decomposition with photochemical collection toward a suitable material is experimentally investigated. In the present process, oxyfluorides such as SOF₂, SO₂F₂, and SOF₄ produced by non-thermal plasma are decomposed by photochemical reactions; consequently the decomposed molecules are adsorbed to a solid calcium compound material. Since the reaction requires relative higher-energy photons to activate the molecules, a vacuum-ultraviolet light irradiation emitted from a Xe discharge lamp is effective to the reaction. The vacuum-ultraviolet photochemical reaction to non-thermal plasma oxidized SF₆ gases is evaluated in an experimentally constructed reactor and the SF₆ removal treatment based on the photochemical reaction is discussed.