DocumentCode
2812185
Title
Optical electronic microdisplacement gage
Author
Emelyanov, V.A. ; Baranov, V.V. ; Ilyin, V.N.
Author_Institution
Res. & Production Corp. "Integral", Minsk
fYear
2007
fDate
27-29 June 2007
Firstpage
1
Lastpage
5
Abstract
In this paper, we developed the model, design and software of a precision device for measuring microdisplacement values, which can be used during automated control of geometrical parameters of various microobjects, and in particular in microelectronics.
Keywords
computerised instrumentation; displacement measurement; gauges; integrated circuits; optoelectronic devices; automated control; microelectronics; optical electronic microdisplacement gage; Integrated circuit modeling; Large scale integration; Lenses; Microwave measurements; Optical interferometry; Optical sensors; Particle measurements; Position measurement; Power measurement; Thickness measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Control & Automation, 2007. MED '07. Mediterranean Conference on
Conference_Location
Athens
Print_ISBN
978-1-4244-1282-2
Electronic_ISBN
978-1-4244-1282-2
Type
conf
DOI
10.1109/MED.2007.4433855
Filename
4433855
Link To Document