Title :
Optical electronic microdisplacement gage
Author :
Emelyanov, V.A. ; Baranov, V.V. ; Ilyin, V.N.
Author_Institution :
Res. & Production Corp. "Integral", Minsk
Abstract :
In this paper, we developed the model, design and software of a precision device for measuring microdisplacement values, which can be used during automated control of geometrical parameters of various microobjects, and in particular in microelectronics.
Keywords :
computerised instrumentation; displacement measurement; gauges; integrated circuits; optoelectronic devices; automated control; microelectronics; optical electronic microdisplacement gage; Integrated circuit modeling; Large scale integration; Lenses; Microwave measurements; Optical interferometry; Optical sensors; Particle measurements; Position measurement; Power measurement; Thickness measurement;
Conference_Titel :
Control & Automation, 2007. MED '07. Mediterranean Conference on
Conference_Location :
Athens
Print_ISBN :
978-1-4244-1282-2
Electronic_ISBN :
978-1-4244-1282-2
DOI :
10.1109/MED.2007.4433855
