• DocumentCode
    2813116
  • Title

    Sub-micron thermography of laser diodes by charging dielectric coatings with an electron beam

  • Author

    Jakubowicz, A.

  • Author_Institution
    Zurich Res. Lab., IBM Res. Div., Ruschlikon, Switzerland
  • fYear
    1994
  • fDate
    19-23 Sep 1994
  • Firstpage
    235
  • Lastpage
    236
  • Abstract
    Electron beam charging thermography, a novel scanning electron microscope-based technique featuring submicron resolution and high speed, has been applied to investigate the thermal behavior of ridge waveguide QW laser diodes. Examples presented illustrate the complexity of thermal effects at and adjacent to laser mirrors
  • Keywords
    electron beam applications; infrared imaging; laser mirrors; laser stability; laser variables measurement; optical testing; quantum well lasers; ridge waveguides; scanning electron microscopy; semiconductor device testing; surface charging; waveguide lasers; dielectric coating charging; electron beam; electron beam charging thermography; high speed; laser diodes; laser mirrors; ridge waveguide quantum well lasers; scanning electron microscope-based technique; sub-micron thermography; submicron resolution; thermal behavior; thermal effects; Chemical lasers; Coatings; Dielectrics; Diode lasers; Electron beams; Gas lasers; Mirrors; Resistors; Scanning electron microscopy; Waveguide lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Laser Conference, 1994., 14th IEEE International
  • Conference_Location
    Maui, HI
  • Print_ISBN
    0-7803-1754-8
  • Type

    conf

  • DOI
    10.1109/ISLC.1994.519350
  • Filename
    519350
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2813116