Nano-level 3-D shape measurement system using 3-wavelength LED light interference fringes

Author

Kimura, Daichi ; Hata, Sheiji ; Hayashi, Jun-ichiro ; Iwamoto, Masakatsu ; Morimoto, Shigeaki ; Kobayashi, Hiroaki

Author_Institution

Kagawa Univ., Kagawa, Japan

fYear

2011

fDate

9-11 Feb. 2011

Firstpage

1

Lastpage

6

Abstract

Nano-level 3-D measurement is one of the key technologies for the current and next generation of production systems for semi-conductors, LCDs and nano-devices. To meet with these applications, “Wide range nano-level 3-D shape measurement method using combination of RGB laser lights” has been developed. It measures the height of nano-objects from the combination of RGB LED lights combinations. To analyze the combination of RGB lights, the color analysis method on xy-color plane has been introduced. In this method, the color changes on xy-color plane means the height changes. Experimental system to measure the micro-meter heights using RGB lightings has been developed, and succeeded to measure the 50 nm step and 500 nm step samples.

Keywords

height measurement; image colour analysis; light emitting diodes; light interference; measurement by laser beam; shape measurement; 3-wavelength LED light interference fringe; RGB laser light; color analysis method; micrometer height measurement; nanolevel 3D shape measurement system; xy-color plane; Brightness; Image color analysis; Interference; Lighting; Measurement by laser beam; Semiconductor device measurement; Shape measurement; 3-D shape measurement; Color image analysis; Interference fringes; RGB LED lights; look-up table; nano-level measurement; xy-color plane;

fLanguage

English

Publisher

ieee

Conference_Titel

Frontiers of Computer Vision (FCV), 2011 17th Korea-Japan Joint Workshop on

Conference_Location

Ulsan

Print_ISBN

978-1-61284-677-4

Electronic_ISBN

978-1-61284-676-7

Type

conf

DOI

10.1109/FCV.2011.5739711

Filename

5739711