Study of the performance comparison between micro-chamber quadrupole mass spectrometer and miniature quadrupole mass spectrometer

In this paper, two different kinds of QMSs, micro-chamber quadrupole mass spectrometer(MCQMS) and miniature quadrupole mass spectrometer(MQMS), are compared from structure and their performance like small volume and low weight, stable working time, easy to fabricate, mass resolution and sensitivity, respectively. The analysis shows that MCQMS has better performance than that of QMS, such as smaller size, higher sensitivity and better stability. The good performance of MCQMS will make it have potential application in outer space in the near future.