Title :
Direct comparison of emission characteristics of extreme ultraviolet radiation from CO2 and Nd:YAG laser-produced plasmas with solid tin target
Author :
Tanaka, Hiroki ; Matsumoto, Atsushi ; Akinaga, Kouzi ; Takahashi, Akihiko ; Okada, Tatsuo
Keywords :
Gratings; Laser beam cutting; Plasma measurements; Plasma properties; Power lasers; Pump lasers; Solid lasers; Tin; Ultraviolet sources; X-ray lasers;
Conference_Titel :
Quantum Electronics Conference, 2005. International
Print_ISBN :
0-7803-9240-X
DOI :
10.1109/IQEC.2005.1561042