Title :
Near-field photolithographic method for making two dimensional photonic bandgap structures
Author :
Wei, Pei-Kuen ; Chang, Wei-Lun ; Chang, Yu-Jen
Keywords :
Electron beams; Interference; Lattices; Lithography; Nanostructures; Optical beams; Optical diffraction; Photonic band gap; Throughput; Writing;
Conference_Titel :
Quantum Electronics Conference, 2005. International
Print_ISBN :
0-7803-9240-X
DOI :
10.1109/IQEC.2005.1561045
