DocumentCode
2815300
Title
Atom funnel with a micron-sized outlet
Author
Kashiwagi, Hiroyuki ; Ito, Haruhiko
fYear
2005
fDate
38544
Firstpage
1160
Lastpage
1161
Keywords
Anisotropic magnetoresistance; Apertures; Atomic beams; Atomic layer deposition; Etching; Finite difference methods; Indium tin oxide; Silicon on insulator technology; Sputtering; Time domain analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
Quantum Electronics Conference, 2005. International
Print_ISBN
0-7803-9240-X
Type
conf
DOI
10.1109/IQEC.2005.1561046
Filename
1561046
Link To Document