Characterization and modeling of a bulk acoustic wave particle focusing device

Author

Ravula, Surendra K. ; Branch, Darren W. ; Westlake, Karl ; Brener, Igal

Author_Institution

Appl. Photonic Microsyst., Sandia Nat. Labs., Albuquerque, NM

fYear

2008

fDate

19-21 May 2008

Firstpage

35

Lastpage

38

Abstract

In this paper, we discuss our work in the modeling and characterization of an acoustic-microfluidic focusing device that uses standing bulk acoustic waves to focus particles under flow. Modeling was done using Comsol Multiphysics^reg (Comsol, Los Angeles, CA), a multiphysics FEM tool, and the performance of the device was assessed through coefficient of variance (CV) measurements using a confocal microscope.

Keywords

acoustic focusing; bulk acoustic wave devices; finite element analysis; microfluidics; optical microscopy; particle size; radiation pressure; sputter etching; Comsol Multiphysics; acoustic radiation pressure profile; acoustic-microfluidic focusing device; bulk acoustic wave particle focusing device modeling; coefficient of variance measurements; confocal microscope; deep reactive ion etching process; finite element method; multiphysics FEM tool; standing bulk acoustic waves; Acoustic devices; Acoustic measurements; Acoustic waves; Etching; Fabrication; Frequency; Microchannel; Microfluidics; Microscopy; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium, 2008 IEEE International

Conference_Location

Honolulu, HI

ISSN

1075-6787

Print_ISBN

978-1-4244-1794-0

Electronic_ISBN

1075-6787

Type

conf

DOI

10.1109/FREQ.2008.4622951

Filename

4622951