Title :
Characterization and modeling of a bulk acoustic wave particle focusing device
Author :
Ravula, Surendra K. ; Branch, Darren W. ; Westlake, Karl ; Brener, Igal
Author_Institution :
Appl. Photonic Microsyst., Sandia Nat. Labs., Albuquerque, NM
Abstract :
In this paper, we discuss our work in the modeling and characterization of an acoustic-microfluidic focusing device that uses standing bulk acoustic waves to focus particles under flow. Modeling was done using Comsol Multiphysicsreg (Comsol, Los Angeles, CA), a multiphysics FEM tool, and the performance of the device was assessed through coefficient of variance (CV) measurements using a confocal microscope.
Keywords :
acoustic focusing; bulk acoustic wave devices; finite element analysis; microfluidics; optical microscopy; particle size; radiation pressure; sputter etching; Comsol Multiphysics; acoustic radiation pressure profile; acoustic-microfluidic focusing device; bulk acoustic wave particle focusing device modeling; coefficient of variance measurements; confocal microscope; deep reactive ion etching process; finite element method; multiphysics FEM tool; standing bulk acoustic waves; Acoustic devices; Acoustic measurements; Acoustic waves; Etching; Fabrication; Frequency; Microchannel; Microfluidics; Microscopy; Silicon;
Conference_Titel :
Frequency Control Symposium, 2008 IEEE International
Conference_Location :
Honolulu, HI
Print_ISBN :
978-1-4244-1794-0
Electronic_ISBN :
1075-6787
DOI :
10.1109/FREQ.2008.4622951
