Title :
Analysis of inhomogeneous stress distribution in surface acoustic wave resonator
Author :
Hermelin, D. ; Daniaux, W. ; Garcia, J. ; Ballandras, S. ; Belgacem, B. ; Bruniaux, M.
Author_Institution :
Inst. FEMTO-ST, Besancon
Abstract :
This paper deals with walk-through allowing to explain the electrical response of a surface acoustic wave (SAW) resonator under inhomogeneous stress. Act of pressure on a circular membrane where is put the resonator induces inhomogeneous stress and changes the resonance frequency and the quality factor of the resonator. This paper describes a developed model allowing to explain the behavior of these two parameters.
Keywords :
Q-factor; stress effects; surface acoustic wave resonators; SAW resonator; inhomogeneous stress distribution; quality factor; surface acoustic wave resonator; Acoustic sensors; Acoustic waves; Biomembranes; Electrodes; Resonance; Resonant frequency; Silicon; Stress; Surface acoustic waves; Wafer bonding;
Conference_Titel :
Frequency Control Symposium, 2008 IEEE International
Conference_Location :
Honolulu, HI
Print_ISBN :
978-1-4244-1794-0
Electronic_ISBN :
1075-6787
DOI :
10.1109/FREQ.2008.4622961
