Title :
Fabrication Technology of Optical Waveguides on Glasses
Author :
Surzev, A.S. ; Shmakov, S.S. ; Akreslina, A.S. ; Orlikov, L.N.
Author_Institution :
Tomsk State Univ. of Control Syst. & Radioelectron., Tomsk
Abstract :
Fabrication technology of optoelectronic elements on glasses, as substitute of elements on crystals is considered. Waveguide is received by formation the film of lead oxide on standard thermovacuum sputtering equipment with the following diffusion at the atmospheric pressure.
Keywords :
lead compounds; optical fabrication; optical films; optical glass; optical waveguides; sputtering; PbO2; diffusion; lead oxide film; optical fabrication; optical glasses; optical waveguides; thermovacuum sputtering; Chemical technology; Communication system control; Glass; Lithium niobate; Optical device fabrication; Optical films; Optical refraction; Optical waveguides; Sputtering; Temperature; Waveguides on glasses; gas-phase reaction; lithium niobate; thermovacuum;
Conference_Titel :
Control and Communications, 2007. SIBCON '07. Siberian Conference on
Conference_Location :
Tomsk
Print_ISBN :
1-4244-0346-4
DOI :
10.1109/SIBCON.2007.371318
