• DocumentCode
    2815672
  • Title

    Fabrication Technology of Optical Waveguides on Glasses

  • Author

    Surzev, A.S. ; Shmakov, S.S. ; Akreslina, A.S. ; Orlikov, L.N.

  • Author_Institution
    Tomsk State Univ. of Control Syst. & Radioelectron., Tomsk
  • fYear
    2007
  • fDate
    20-21 April 2007
  • Firstpage
    165
  • Lastpage
    168
  • Abstract
    Fabrication technology of optoelectronic elements on glasses, as substitute of elements on crystals is considered. Waveguide is received by formation the film of lead oxide on standard thermovacuum sputtering equipment with the following diffusion at the atmospheric pressure.
  • Keywords
    lead compounds; optical fabrication; optical films; optical glass; optical waveguides; sputtering; PbO2; diffusion; lead oxide film; optical fabrication; optical glasses; optical waveguides; thermovacuum sputtering; Chemical technology; Communication system control; Glass; Lithium niobate; Optical device fabrication; Optical films; Optical refraction; Optical waveguides; Sputtering; Temperature; Waveguides on glasses; gas-phase reaction; lithium niobate; thermovacuum;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Control and Communications, 2007. SIBCON '07. Siberian Conference on
  • Conference_Location
    Tomsk
  • Print_ISBN
    1-4244-0346-4
  • Type

    conf

  • DOI
    10.1109/SIBCON.2007.371318
  • Filename
    4233297
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2815672