The Effect of Humidity and Environment Temperature on Thin Film Pt/SnO2:Sb Gas Sensors

Author

Anisimov, O.V. ; Maksimova, N.K. ; Chernikov, E.V. ; Sevastyanov, E.Y. ; Sergeychenko, N.V.

Author_Institution

Siberian Phys. Tech. Inst., Tomsk

fYear

2007

fDate

20-21 April 2007

Firstpage

202

Lastpage

206

Abstract

The effect of humidity on tin oxide thin film gas sensors has been studied in the case of methane. We found that the sensor resistance and response to methane are dramatically increased at decreasing of humidity. The results are qualitatively explained under the assumption that water molecules dissociate on the SnO₂ surface, produce hydroxyl species capable of acting as electron donors and decrease the densities of chemisorbed atomic oxygen and lattice oxygen atoms.

Keywords

antimony; chemisorption; dissociation; gas sensors; humidity; platinum; semiconductor thin films; thin film sensors; tin compounds; water; O; Pt-SnO₂:Sb; SnO₂; chemisorbed atomic oxygen; electron donors; environment temperature effect; humidity effect; hydroxyl species; lattice oxygen atoms; methane; thin film gas sensors; water molecule dissociation; Chemical sensors; Communication system control; Gas detectors; Humidity; Lattices; Plasma temperature; Sputtering; Temperature sensors; Thin film sensors; Tin; SnO2 sensor; humidity effect; thin films;

fLanguage

English

Publisher

ieee

Conference_Titel

Control and Communications, 2007. SIBCON '07. Siberian Conference on

Conference_Location

Tomsk

Print_ISBN

1-4244-0346-4

Type

conf

DOI

10.1109/SIBCON.2007.371325

Filename

4233304