MEMS compatible PZT arrays for ultrasonic applications on 3 dimensional carriers

Piezoelectric sensors and actuators are a cost-effective and easy choice to drive MEMS (micro-electromechanical systems). Nevertheless piezoelectricity is not widely applied in commercial applications. One of the reasons is the incompatibility of standard MEMS processes and piezoelectric ceramics. To overcome these disadvantages this paper presents a technique to fabricate piezoelectric ceramic films on a substrate. Preceding theoretical considerations about the desirable film parameters lead to a thick film process that is structured by photolithography. Concluding measurements show, that the film has comparable physical properties to commercially available bulk ceramics and is therefore very beneficial for MEMS devices.