DocumentCode :
2815856
Title :
Remote electromagnetic excitation of miniaturized in-plane plate resonators for sensing applications
Author :
Reichel, Erwin K. ; Riesch, Christian ; Keplinger, Franz ; Jakoby, Bernhard
Author_Institution :
Inst. for Microelectron. & Microsensors, Johannes Kepler Univ., Linz
fYear :
2008
fDate :
19-21 May 2008
Firstpage :
144
Lastpage :
147
Abstract :
For the purpose of measuring the viscosity of complex structured liquids, a novel type of resonator is employed. A metallic frame with a spring-mounted plate in its center is placed in a magnetic field exhibiting a constant and a superposed sinusoidal component. This way, a dominant in-plane motion is excited. The numerical analysis of the frequency response shows a useable viscosity range up to approx. 1 Paldrs in a frequency range below 1500 Hz. Experiments demonstrate the feasibility of the concept, which is suited for further miniaturization.
Keywords :
electric sensing devices; electromagnetic fields; frequency response; microsensors; resonators; viscosity measurement; frequency response numerical analysis; miniaturized in-plane plate resonators; remote electromagnetic excitation; viscosity measurement; Acoustic sensors; Biomedical measurements; Coils; Frequency; Magnetic field measurement; Magnetic fields; Magnetic levitation; Magnetic sensors; Springs; Viscosity;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Frequency Control Symposium, 2008 IEEE International
Conference_Location :
Honolulu, HI
ISSN :
1075-6787
Print_ISBN :
978-1-4244-1794-0
Electronic_ISBN :
1075-6787
Type :
conf
DOI :
10.1109/FREQ.2008.4622976
Filename :
4622976
Link To Document :
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