Title :
The analysis of high frequency vibrations of layered anisotropic plates for FBAR applications
Author :
Huang, Dejin ; Wang, Ji ; Du, Jianke
Author_Institution :
Sch. of Eng., Ningbo Univ., Ningbo
Abstract :
In this paper, the thickness-extension vibration of a layered piezoelectric plate is investigated. The vibration deformation consists of symmetric and asymmetric deformation. Thicknesses of the adhered layers will influence the frequency of the plate and the amplitude ratio between the layers significantly.
Keywords :
acoustic resonators; anisotropic media; bulk acoustic wave devices; deformation; inhomogeneous media; piezoelectric materials; plates (structures); vibrations; asymmetric deformation; film bulk acoustic wave resonators; high frequency vibrations; layered anisotropic plates; layered piezoelectric plate; symmetric deformation; thickness-extension vibration; vibration deformation; Acoustic waves; Anisotropic magnetoresistance; Equations; Film bulk acoustic resonators; Frequency; Piezoelectric devices; Piezoelectric films; Stress; Substrates; Thin film devices;
Conference_Titel :
Frequency Control Symposium, 2008 IEEE International
Conference_Location :
Honolulu, HI
Print_ISBN :
978-1-4244-1794-0
Electronic_ISBN :
1075-6787
DOI :
10.1109/FREQ.2008.4622990
