• DocumentCode
    2816046
  • Title

    The analysis of high frequency vibrations of layered anisotropic plates for FBAR applications

  • Author

    Huang, Dejin ; Wang, Ji ; Du, Jianke

  • Author_Institution
    Sch. of Eng., Ningbo Univ., Ningbo
  • fYear
    2008
  • fDate
    19-21 May 2008
  • Firstpage
    204
  • Lastpage
    208
  • Abstract
    In this paper, the thickness-extension vibration of a layered piezoelectric plate is investigated. The vibration deformation consists of symmetric and asymmetric deformation. Thicknesses of the adhered layers will influence the frequency of the plate and the amplitude ratio between the layers significantly.
  • Keywords
    acoustic resonators; anisotropic media; bulk acoustic wave devices; deformation; inhomogeneous media; piezoelectric materials; plates (structures); vibrations; asymmetric deformation; film bulk acoustic wave resonators; high frequency vibrations; layered anisotropic plates; layered piezoelectric plate; symmetric deformation; thickness-extension vibration; vibration deformation; Acoustic waves; Anisotropic magnetoresistance; Equations; Film bulk acoustic resonators; Frequency; Piezoelectric devices; Piezoelectric films; Stress; Substrates; Thin film devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium, 2008 IEEE International
  • Conference_Location
    Honolulu, HI
  • ISSN
    1075-6787
  • Print_ISBN
    978-1-4244-1794-0
  • Electronic_ISBN
    1075-6787
  • Type

    conf

  • DOI
    10.1109/FREQ.2008.4622990
  • Filename
    4622990