DocumentCode
2816046
Title
The analysis of high frequency vibrations of layered anisotropic plates for FBAR applications
Author
Huang, Dejin ; Wang, Ji ; Du, Jianke
Author_Institution
Sch. of Eng., Ningbo Univ., Ningbo
fYear
2008
fDate
19-21 May 2008
Firstpage
204
Lastpage
208
Abstract
In this paper, the thickness-extension vibration of a layered piezoelectric plate is investigated. The vibration deformation consists of symmetric and asymmetric deformation. Thicknesses of the adhered layers will influence the frequency of the plate and the amplitude ratio between the layers significantly.
Keywords
acoustic resonators; anisotropic media; bulk acoustic wave devices; deformation; inhomogeneous media; piezoelectric materials; plates (structures); vibrations; asymmetric deformation; film bulk acoustic wave resonators; high frequency vibrations; layered anisotropic plates; layered piezoelectric plate; symmetric deformation; thickness-extension vibration; vibration deformation; Acoustic waves; Anisotropic magnetoresistance; Equations; Film bulk acoustic resonators; Frequency; Piezoelectric devices; Piezoelectric films; Stress; Substrates; Thin film devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium, 2008 IEEE International
Conference_Location
Honolulu, HI
ISSN
1075-6787
Print_ISBN
978-1-4244-1794-0
Electronic_ISBN
1075-6787
Type
conf
DOI
10.1109/FREQ.2008.4622990
Filename
4622990
Link To Document