Manufacturing technology and yield studies for MMIC 5-bit digital attenuators and phase-shifters

Author

Gupta, R. ; Holdeman, L. ; Carlson, H. ; Potukuchi, J. ; Hogan, K. ; Pande, K.

Author_Institution

Comsat Lab., Clarksburg, MD, USA

fYear

1990

fDate

7-10 Oct. 1990

Firstpage

305

Lastpage

308

Abstract

Design and manufacturing approaches for highly reproducible, digitally controlled GaAs MMIC 5-bit attenuators and phase-shifters are presented. A computer-aided automated DC measurement procedure is developed to 100% test all devices and produce a full-wafer yield map. Statistical process control using a computerized wafer tracking system resulted in a number of process improvements, a considerable yield enhancement with DC yields exceeding 70%, and increased wafer throughput. Good chip-to-chip performance uniformity is obtained, which makes the MMICs suitable for insertion in a Ku-band transmit phased-array antenna.<>

Keywords

III-V semiconductors; MMIC; gallium arsenide; integrated circuit technology; phase shifters; waveguide attenuators; DC yields; GaAs; Ku-band; MMIC; computer-aided automated DC measurement procedure; computerized wafer tracking system; digital attenuators; full-wafer yield map; phase-shifters; transmit phased-array antenna; wafer throughput; yield studies; Attenuators; Automatic control; Automatic testing; Digital control; Gallium arsenide; MMICs; Manufacturing; Process control; Semiconductor device measurement; Throughput;

fLanguage

English

Publisher

ieee

Conference_Titel

Gallium Arsenide Integrated Circuit (GaAs IC) Symposium, 1990. Technical Digest 1990., 12th Annual

Conference_Location

New Orleans, LA, USA

Type

conf

DOI

10.1109/GAAS.1990.175515

Filename

175515