Title :
Backside observation of semiconductor devices using a laser THz emission microscope
Author :
Yamashita, Masatsugu ; Nikawa, Kiyoshi ; Tonouchi, Masayoshi ; Otani, Chiko ; Kawase, Kodo
Keywords :
Electron microscopy; Failure analysis; Integrated circuit interconnections; Large scale integration; Laser excitation; MOSFET circuits; Optical pulses; Pump lasers; Semiconductor devices; Semiconductor lasers;
Conference_Titel :
Quantum Electronics Conference, 2005. International
Print_ISBN :
0-7803-9240-X
DOI :
10.1109/IQEC.2005.1561149
